| Diameter |
| 1" (25,4 mm) |
2" (50,8 mm) |
3" (76,2 mm) |
| 4" (100 mm) |
5" (125 mm) |
6" (150 mm) |
|
Any other specification upon request.
|
|
| Type and doping |
| n-type |
- P - Phosphorus
- Sb - Antimony
- As - Arsenic doped
|
| p-type |
|
|
Heavely doped phosophorus and boron wafers.
|
|
| Orientation |
|
| Orientation tolerance |
standard : +/- 0,5°
upon request : until +/- 0,05° |
|
| Off orientation |
|
Other orientations upon request [ex : (510)]
|
|
| Resistivity |
| From 1 milliohmcm to 150 ohmcm |
|
| Thickness |
| standard for |
1" |
2" |
3" |
4" |
5" |
6" |
| (µm ) |
250 |
275 |
380 |
525 |
625 |
675 |
| tolerance +/- (µm ) |
15 |
25 |
25 |
20 |
20 |
20 |
|
Any other specifications upon request.
|
|
| Surface |
| As Cut |
Lapped |
Etched |
SSP |
DSP |
|
| Diameter * |
|
| Particle count |
| 10-25 |
10-25 |
10-25 |
< 10 |
< 15 |
< 15 |
|
| TTV Std (µm) * |
|
| TTV min (µm) * |
|
| Bow (µm) * |
| < 30 |
< 30 |
< 30 |
< 40 |
< 40 |
< 40 |
|
* Any other specifications upon request
|
|
| Roughness (Ra) |
| On polished surface : Less than 1 nm |
|
| Flatness |
| On polished surface : Less than 1 µm |
|
| Laser marking |
Upon request
|
| SEMI STANDARDS |
All other specifications comply with SEMI STD (packaging, product identification, ...)
|
| Quality control |
All our consignments are sent with a certificate of conformity. |
